Pentakis(dimethylamido)tantalum(V)

General Information

Description

99.9999%, Industrial synthesis, Orange solid

Formula
C₁₀H₃₀N₅Ta
Product Number
P200037
CAS Number
19824-59-0
Lead time
Under planning week(s)
Size
5g
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Detailed Specification

EC Number
624-567-4
Form
Orange solid
Mol. Wt. (g/mol)
401.33
MDL Number
MFCD01631286
UNSPSC Code
12352103
Color
Orange
NACRES
NA.23

Application

A tantalum source precursor for atomic layer deposition (ALD) and chemical vapor deposition (CVD) processes, used to prepare tantalum nitride (TaN) and tantalum oxide (Ta2O5) thin films

Chemical Classification

Organic Chemicals, Organometallic Compounds

Industry

Electrical & Semiconductor

Base Element

Carbon, Hydrogen, Nitrogen, Tantalum

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Pentakis(dimethylamido)tantalum(V)

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